The T-12 Group contributes to Los Alamos efforts in the Topography Thrust Area for the Center for Semiconductor Simulation and Modeling (CSMS). The CSMS is a CRADA-supported activity that involves the DOE Laboratories and the Semiconductor Research Corporation (SRC).
Within the Topography Thrust Area, we are working on two principal projects. The first is to study the reaction mechanisms of processes that occur both in the gas phase and at the vapor/silicon-surface interface during etch and deposition processes. The second is to develop and enhance profile simulation software tools to aid industry fabrication designers in the manufacture of patterned silicon wafers.
People in T-12 working on this project include: