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This page shows some sample results of representative calculations,
and provides links to presentations describing TopoSim-3D.
- Viewgraphs presented to the SRC Back-end
TAB meeting, 10/28/99.
- Part 1 covers overview and TopoSim-3D.
Note -- this file is a pdf, 794KB, LA-UR-99-2071.
- Part 2 covers MD simulations of metal and ion
sputtering. Also a pdf file, 82KB.
- More Viewgraphs, "Material Deposition at the Atomic and Molecular Level,"
by R. B. Walker, J. D. Kress, D. E. Hanson, A. F. Voter, J. T. Gammel, M. E. Coltrin,
and P. Ho, Los Alamos National Laboratory Report LA-UR-00-2412.
- Another internal report, R. B. Walker, J. D. Kress, D. E. Hanson,
A. F. Voter, J. T. Gammel, M. E. Coltrin, and P. Ho, "Modeling the Growth of
Thin Films in Complex 3D Geometrical Structures," Los Alamos
National Laboratory Report LA-UR-00-1.
- Several views of deposition into a damascene
structure
- Sticking factor dependence of deposition into a
damascene structure
- Deposition into via at trench corner
- Deposition into overhang geometry
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