A 3D Feature-Scale
Profile Simulation Tool

Copyright Notice
Copyright, 1997-2000, The Regents of the University of California. This software was produced under US Government Contract (W-7405-ENG-36) by the Los Alamos National Laboratory, which is operated by the University of California for the US Department of Energy. The US Government is licensed to use, reproduce, and distribute this software. Neither the Government nor the University makes any warranty, expressed or implied, or assumes any liability or responsibility for the use of this software.

      These pages describe the the TopoSim-3D topographic simulator, developed at Los Alamos National Laboratory in the Center for Semiconductor Modeling and Simulation (CSMS). This software is available to the Semiconductor Research Corporation (SRC) under the Cooperative Research and Development Agreement (CRADA) in place between the SRC and the US Department of Energy (DOE).

From here, you can access the following:

  • Some example calculations
  • Documentation about TopoSim-3D (passwords required)
  • Download the software (must be CRADA participant, passwords required)


Go to Home Page for
TopoSim-3D   |   LANL T-12 Group   |   Theoretical Division   |   Los Alamos National Laboratory

Last updated 03/13/00
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